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X-ray diffraction study of TiN coatings sputtered at different substrate temperatures

✍ Scribed by V. Valvoda; R. Kužel Jr.; R. Černý; L. Dobiášová; J. Musil; V. Poulek


Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
543 KB
Volume
23
Category
Article
ISSN
0232-1300

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