## Abstract Zirconium nitride (ZrN) coatings were prepared on Si (100) by single ion beam sputtering in N~2~ and Ar mixture at different substrate temperatures. Structure and morphology of the ZrN coatings were analyzed using X‐ray diffraction and atomic force microscopy. Rutherford backscattering
✦ LIBER ✦
X-ray diffraction study of TiN coatings sputtered at different substrate temperatures
✍ Scribed by V. Valvoda; R. Kužel Jr.; R. Černý; L. Dobiášová; J. Musil; V. Poulek
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Weight
- 543 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0232-1300
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