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Morphology of AlN formed in aluminum by ion implantation

✍ Scribed by S. Fukumoto; M. Ando; H. Tsubakino; M. Terasawa; T. Mitamura

Book ID: 114194345
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 459 KB
Volume: 54
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00027-3

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