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Morphological and structural characterization of CrO2/Cr2O3 films grown by Laser-CVD

โœ Scribed by P.M. Sousa; A.J. Silvestre; N. Popovici; O. Conde


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
548 KB
Volume
247
Category
Article
ISSN
0169-4332

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The structure and morphology of chromium disilicide (CrSi 2 ) nanometric films grown on h1 0 0i silicon substrates both at room temperature (RT) and at 740 K by pulsed laser ablation are reported. A pure CrSi 2 crystal target was ablated with a KrF excimer laser in vacuum ($3 ร‚ 10 ร€5 Pa). Morphologi