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Morphological and compositional changes of the target surface during RF magnetron sputtering of the Y-Ba-Cu-O system

✍ Scribed by R.A. Chakalov; M.V. Abrashev

Book ID: 103948856
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 453 KB
Volume: 223
Category: Article
ISSN: 0921-4534
DOI: 10.1016/0921-4534(94)90710-2

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