Effects of target and template layer on the properties of highly crystalline superconducting a-axis films of Y1Ba2Cu3O7−x by DC-sputtering

✍ Scribed by S. Mahajan; W. Ito; Y. Yoshida; T. Morishita

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 864 KB
• Volume: 213
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(93)90465-3

✦ Synopsis

Highly crystalline superconducting a-axis oriented thin films of Y~Ba2Cu3OT_x were prepared using the template layer method on SrTiO3, MgO and NdGaO3 substrates by DC-spunering in the on-axis configuration. A full width at half maximum value of 0.05 ° was measured through the rocking curve of the ( 200) film peak on SrTiO3. The films had a very smooth surface morphology with no particles as revealed by scanning electron microscopy and a critical onset temperature above 84 K. Critical current density as measured by magnetic hysteresis measurements was found to be inversely related to the crystallinity of the film. The characteristics of the resulting films were largely dependent on the target used, mainly on the activated oxygen released from the target. The effects of template layer and substrate biasing on the crystalline and superconducting properties of a-axis films are discussed.