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Monte Carlo simulations of electron dynamics in N2/CO2mixtures

✍ Scribed by M. Janda; V. Martišovitš; M. Morvová; Z. Machala; K. Hensel

Book ID
111628459
Publisher
Springer
Year
2007
Tongue
English
Weight
277 KB
Volume
45
Category
Article
ISSN
1434-6060

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## Abstract The structure of radio‐frequency (rf) discharges in N~2~ is examined for the electrons and positive ions, in which electron–neutral collisions and ion–neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz a