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Monte Carlo simulation of sputtering in Au-Cu alloys — Simulation with formation of altered layer included

✍ Scribed by H.J. Kang; R. Shimizu


Publisher
Elsevier Science
Year
1986
Weight
51 KB
Volume
169
Category
Article
ISSN
0167-2584

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## Ratios of M*,,VVAuger peak heights of gold and copper for the Au~&I~,~ alloy expected for particular compositions of two surface atomic layers and for two incidence angles of the primary electron beam in an RFA spectrometer were calculated with the use of Monte-Carlo computer simulation of the