Monte Carlo simulation of electrochemical oscillations in the electropolishing regime

✍ Scribed by Foca, E. ;Carstensen, J. ;Föll, H.

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 233 KB
• Volume: 202
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200461169

✦ Synopsis

Abstract

Current oscillations, and for the first time, voltage oscillations too, which occur at the Si electrode in a HF electrolyte in the electropolishing regime, are quantitatively calculated using Monte Carlo simulations based on the current burst model. Results obtained for relatively large areas comprise stable, unstable and damped oscillations, the formation of synchronized domains, and the influence of external voltage modulations, always in conjunction with all other parameters like oxide thickness and roughness behavior, or electrode capacitance. The results show good quantitative agreement in all respects with the experiments. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)