Monitoring of gas-phase species in metalorganic vapor phase epitaxy by fiber-optics based Fourier transform infrared spectroscopy

✍ Scribed by Sateria Salim; K.F. Jensen; R.D. Driver

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 651 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91025-1