✦ LIBER ✦
In-situ measurement of gas-phase reactions during the metal-organic chemical vapor deposition of copper using Fourier-transform infrared spectroscopy
✍ Scribed by Ken-ichi Hanaoka; Kunihide Tachibana; Hiroshi Ohnishi
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 979 KB
- Volume
- 262
- Category
- Article
- ISSN
- 0040-6090
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