Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of (Ultra)Nanocrystalline Diamond Films

✍ Scribed by Maxie Eckert; Erik Neyts; Annemie Bogaerts

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 199 KB
• Volume: 14
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200706657