𝔖 Bobbio Scriptorium

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Molecular dynamics simulation analyses on injection angle dependence of SiO2 sputtering yields by fluorocarbon beams

✍ Scribed by Tomohito Kawase; Satoshi Hamaguchi

Book ID: 108289494
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 481 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.10.024

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