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[IEEE 2000 International Conference on Simulation of Semiconductor Processes and Devices - Seattle, WA, USA (6-8 Sept. 2000)] 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) - Prediction of SiO/sub 2/ sputtering yield using molecular dynamics simulation

โœ Scribed by Kyusang Lee, ; Tai-Kyung Kim,


Book ID
126608949
Publisher
IEEE
Year
2000
Weight
280 KB
Category
Article
ISBN-13
9780780362796

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