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Molecular design of improved precursors for the MOCVD of oxides used in microelectronics

✍ Scribed by Anthony C. Jones; Helen C. Aspinall; Paul R. Chalker

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 721 KB
Volume: 201
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2007.04.118

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