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The Unusual Thermal Stabilization of MOCVD Precursors by the Dibenzoyl Methanate Group: Liquid Injection MOCVD of Tantalum Oxide and Niobium Oxide Using M(OEt)4(dbm) Precursors

✍ Scribed by P. A. Williams; A. C. Jones; P. J. Wright; M. J. Crosbie; J. F. Bickley; A. Steiner; H. O. Davies; T. J. Leedham

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
281 KB
Volume
8
Category
Article
ISSN
0948-1907

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The double metal alkoxide Mg[Nb(OEt) 6 ] 2 (2EtOH) has been in investigated as a single-source precursor for the deposition of magnesium niobium oxide and lead magnesium niobate by liquid-injection MOCVD. The presence of Pb(thd) 2 (thd = 2,2,6,6-tetramethylheptane-3,5-dionate) has been shown to sign