Molecular design of fullerene-based ultralow-kdielectrics

✍ Scribed by Wang, Yuekui ;Seifert, Gotthard ;Hermann, Helmut

• Book ID: 105363873
• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 355 KB
• Volume: 203
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200622312

✦ Synopsis

Abstract

This paper presents results of a theoretical study of hypothetical insulating layers for semi‐conducting circuits. The dielectric material consists of C~60~ fullerenes interconnected by bridge molecules. The structural optimisation is carried out using quantum‐chemical methods. The predicted materials have ultralow values of the static dielectric constant of about k = 1.5 and good elastic bulk moduli of B = 12 to 17 GPa. These values meet the demands of future microelectronic devices. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)