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Molded grating

Book ID
122525671
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
180 KB
Volume
95
Category
Article
ISSN
0026-0576

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This paper describes a novel simple process suitable for fabrication of micro-periodic structure in optical waveguide. The mold was fabricated using electron beam lithography and fast atom beam etching. Sub-micron-scale patterns were transferred from silicon mold to polymer layer. Grating coupler wa