Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy

✍ Scribed by J Bonse; K.-W Brzezinka; A.J Meixner

• Book ID: 108418192
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 676 KB
• Volume: 221
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(03)00881-x