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Modified procedure for deposition of ITO films by DC sputtering

โœ Scribed by Jachimowski, M; Brudnik, A; Czternastek, H

Book ID
121439838
Publisher
Institute of Physics
Year
1985
Tongue
English
Weight
242 KB
Volume
18
Category
Article
ISSN
0022-3727

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We have investigated the effects of Ti doping on the structural, optical, and electrical properties of indium tin oxide (ITO) thin films prepared by direct-current (DC) sputtering at room temperature. It is observed that the Ti doping changes the microstructure of the ITO films from amorphous to pol