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Modification of thin gold films with a scanning force microscope

✍ Scribed by H.W. Schumacher; B. Kracke; B. Damaschke

Book ID
107864663
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
501 KB
Volume
264
Category
Article
ISSN
0040-6090

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Using an atomic force microscope (AFM) operating in air, we locally modify thin films of ebeam-deposited Cr and Ti by applying voltage pulses between the AFM tip and the sample, which is positively biased with respect to the tip. The modifications consist in anodization and/or mechanical deformation