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Modification of the optical and structural properties of dielectric ZrO2 films by ion‐assisted deposition

✍ Scribed by Martin, P. J.; Netterfield, R. P.; Sainty, W. G.

Book ID
111922565
Publisher
American Institute of Physics
Year
1984
Tongue
English
Weight
659 KB
Volume
55
Category
Article
ISSN
0021-8979

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