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Investigation of optical and structural properties of ion-assisted deposition (IAD) ZrO2thin films

✍ Scribed by Farhan, Mansour Suker; Zalnezhad, Erfan; Bushroa, Abdul Razak

Book ID
121603826
Publisher
Korean Society for Precision Engineering
Year
2013
Tongue
English
Weight
474 KB
Volume
14
Category
Article
ISSN
1229-8557

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Silicon nitride (SiN x ) films were prepared by ion-assisted deposition process. The films were analyzed by measurement of scanning electron microscopy (SEM), Fourier transform infrared spectrometry (FTIR), Xray photoelectron spectrometry, spectrophotometer, and ellipsometer measurements. The effect