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Modification of surface morphology of solids by ion-beam sputtering

✍ Scribed by Zbigniew W. Kowalski


Publisher
Springer
Year
1987
Tongue
English
Weight
808 KB
Volume
6
Category
Article
ISSN
0261-8028

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Ion Beam Modification of InSe Surfaces
✍ Brojerdi, G.; Tyuliev, G.; Fargues, D.; Eddrief, M.; Balkanski, M. πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 662 KB

Ion beam modiÐcation of InSe (single crystals and molecular beam epitaxy-grown thin Ðlms on Si(111) substrate) by Ar' and O' (3 keV beam energy) is studied by XPS. The Ar' ion bombardment produces surface layer enrichment in metallic indium with a gradient of concentrations, i.e. the top surface lay