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Modification of Piezoelectrics Surfaces by Diamond-Like Carbon Films and Application to SAW Devices

✍ Scribed by S.A. Zhgoon; Q. Zhang; S.F. Yoon; J. Ahn


Book ID
110361049
Publisher
Springer US
Year
2001
Tongue
English
Weight
78 KB
Volume
7
Category
Article
ISSN
1385-3449

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In this study we have deposited silver-containing hydrogenated and hydrogen-free diamond-like carbon (DLC) nanocomposite thin films by plasma immersion ion implantation-deposition methods. The surface and nano-tribological characteristics were studied by X-ray photoelectron spectroscopy (XPS), atomi