Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

✍ Scribed by I-Tseng Tang; Han-Jan Chen; W.C Hwang; Y.C Wang; Mau-Phon Houng; Yeong-Her Wang

• Book ID: 108165652
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 625 KB
• Volume: 262
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2003.10.081