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Modification of germanium nanoclusters in GeOxfilms during isochronous furnace and pulse laser annealing

✍ Scribed by D. V. Marin; V. A. Volodin; E. B. Gorokhov; D. V. Shcheglov; A. V. Latyshev; M. Vergnat; J. Koch; B. N. Chichkov

Book ID: 111450703
Publisher: SP MAIK Nauka/Interperiodica
Year: 2010
Tongue: English
Weight: 645 KB
Volume: 36
Category: Article
ISSN: 1063-7850
DOI: 10.1134/s1063785010050159

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