Modification of electrical and optical properties of metal nitride thin films by hydrogen inclusion

✍ Scribed by Y Hayashi; T Ishikawa; D Shimokawa

• Book ID: 117620254
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 138 KB
• Volume: 330-332
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/s0925-8388(01)01495-5