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Modelling of the formation of buried dielectric layers by ion implantation

✍ Scribed by H.U. Jäger

Book ID: 113282515
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 717 KB
Volume: 65
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95014-i

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