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Modelling of images of square-wave gratings and isolated edges using rigorous diffraction theory

โœ Scribed by J.T. Sheridan; C.J.R. Sheppard


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
818 KB
Volume
105
Category
Article
ISSN
0030-4018

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A theory of the image formation for a scanning differential heterodyne microscope is presented using the rigorous diffraction theory for perfectly conducting arbitrary-surfaced object. Computed results are compared with experimental responses to a step-like object with the 0.35 ฮผm height and the 0.3