Modeling of step-like object images in scanning differential heterodyne microscope using rigorous diffraction theory
✍ Scribed by I.M. Akhmedzhanov; D.V. Baranov; E.M. Zolotov
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 138 KB
- Volume
- 1
- Category
- Article
- ISSN
- 1612-2011
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✦ Synopsis
A theory of the image formation for a scanning differential heterodyne microscope is presented using the rigorous diffraction theory for perfectly conducting arbitrary-surfaced object. Computed results are compared with experimental responses to a step-like object with the 0.35 μm height and the 0.3 μm transition. The superresolving object characterization is analyzed using a variation of step parameters. An enhancement of microscope sensitivity using an adjustment of the interval between probing spots and choosing the polarization state of probing beams is investigated. The responses obtained with the rigorous method and those obtained by means of the scalar diffraction theory are compared.