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Modelling of heat transfer processes in low-pressure CVD reactors

✍ Scribed by L. Zambov

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 335 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)90012-8

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