✦ LIBER ✦

Modelling of bias sputter deposition processes

✍ Scribed by S. Berg; I.V. Katardjiev

Book ID: 107930407
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 837 KB
Volume: 68-69
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90181-3

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