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Modelling and numerical simulation of an epitaxial reactor

✍ Scribed by Jean-Pierre Babary; Jorge Lopes de Souza Leao

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
761 KB
Volume
26
Category
Article
ISSN
0378-4754

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✦ Synopsis

The purpose of this article concerns the mctielliilg of the thermal behaviour of an epitaxial reactor. Numerical simulat ions (FORTRAN and CSMP III) are very useful for testing the validity of simplif$ed models obtained from a complex non linear distributed parameter system.

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