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Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

✍ Scribed by M.T. Swihart; S. Nijhawan; M.R. Mahajan; S.-M. Suh; S.L. Girshick

Book ID
117131122
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
166 KB
Volume
29
Category
Article
ISSN
0021-8502

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