Modeling of the silicon (100) thermal oxidation: from quantum to macroscopic formulation

✍ Scribed by A Esteve; M Djafari Rouhani; Ph Faurous; D Esteve

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 439 KB
• Volume: 3
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(00)00009-3