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Modeling of RF filter component based on film bulk acoustic resonator

โœ Scribed by Shi-Heng Zhao; Shu-Rong Dong; Hui-Jin Zhang; Wei-Wei Cheng; Xiao-Xia Han

Book ID
117910580
Publisher
IEEE
Year
2009
Tongue
English
Weight
623 KB
Volume
55
Category
Article
ISSN
0098-3063

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Design and fabrication of integrated fil
Design and fabrication of integrated film bulk acoustic resonator and filter on silicon nitride membrane
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## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo