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Modeling of plasma process data using a multi-parameterized generalized regression neural network

✍ Scribed by Byungwhan Kim; Minji Kwon; Sang Hee Kwon

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 183 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.09.015

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