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Modeling of materials synthesis in hybrid plasma reactors: Production of silicon by thermal decomposition of SiCI4

✍ Scribed by John W. McKelliget; Nagy El-Kaddah


Book ID
112820901
Publisher
The Minerals, Metals & Materials Society
Year
1990
Tongue
English
Weight
854 KB
Volume
21
Category
Article
ISSN
1543-1916

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