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Modeling of high-pressure, high-frequency (RF) oxygen plasmas

✍ Scribed by Or, D.T.; Subramanian, N.S.; Heberlein, J.V.R.; Pfender, E.


Book ID
117863067
Publisher
IEEE
Year
1997
Tongue
English
Weight
212 KB
Volume
25
Category
Article
ISSN
0093-3813

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