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Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy

✍ Scribed by M. Zmeck; L. Balk; T. Osipowicz; F. Watt; J. Phang; A. Khambadkone; F.-J. Niedernostheide; H.-J. Schulze

Book ID: 114167335
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 281 KB
Volume: 210
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)01022-x

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