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Modeling of Cu gettering in p- and n-type silicon and in poly-silicon

✍ Scribed by R. Hoelzl; K.-J. Range; L. Fabry

Publisher: Springer
Year: 2002
Tongue: English
Weight: 278 KB
Volume: 75
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390101021

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