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Modeling of a helicon plasma source

✍ Scribed by Bose, D.; Govindan, T.R.; Meyyappan, M.

Book ID: 120666285
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 754 KB
Volume: 31
Category: Article
ISSN: 0093-3813
DOI: 10.1109/TPS.2003.815475

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