✦ LIBER ✦

Model investigations of the oxidation of silicon by high dose implantation

✍ Scribed by H.U. Jäger

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A model for the oxidation of silicon by

✍ H.U. Jäger; E. Hensel; U. Kreissig; W. Skorupa; E. Sobeslavsky 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 614 KB

Blocking of silicon oxidation by low-dos

✍ K. Schott; K. C. Hofmann; M. Schulz 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 400 KB

Oxide rate characterization of high dose

✍ Mikołaj Kisielewicz 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 567 KB

High dose arsenic implantation of silico

✍ H.I. Budinov; D.S. Karpuzov 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 495 KB

An investigation of phase formation by h

✍ Z. Rao; J.S. Williams; A.P. Pogany; D.K. Sood 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 342 KB

A simple model for dry oxidation of sili

✍ R. Marinescu; A. Silard 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 158 KB