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Model approach to solving the inverse problem of X-ray reflectometry and its application to the study of the internal structure of hafnium oxide films

โœ Scribed by Yu. O. Volkov, I. V. Kozhevnikov, B. S. Roshchin, E. O. Filatova, V. E. Asadchikov


Book ID
119884417
Publisher
SP MAIK Nauka/Interperiodica
Year
2013
Tongue
English
Weight
264 KB
Volume
58
Category
Article
ISSN
1063-7745

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