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MOCVD of the Cubic Zinc Nitride Phase, Zn3N2, Using Zn[N(SiMe3)2]2 and Ammonia as Precursors

✍ Scribed by E. Maile; R. A. Fischer

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 564 KB
Volume: 11
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200506383

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