✦ LIBER ✦
MOCVD of TaN Using the All-Nitrogen-Coordinated Precursors [Ta(NEtMe)3(N-tBu)], [Ta(NEtMe)(N-tBu){C(N-iPr)2(NEtMe)}2], and [Ta(NMeEt)2(N-tBu){Me2N-N(SiMe3)}]
✍ Scribed by A. Baunemann; M. Lemberger; A. J. Bauer; H. Parala; R. A. Fischer
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 364 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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