Mitsuharu konuma film deposition by plasma techniques; 1992. X, 224 pp. 185 figs., 30 tabs. (Springer Series on Atoms and Plasmas. Eds: G. Ecker, P. Lambropoulos, I. I. Sobelman, H. Walter. Vol. 10) Hardcover DM 98,- ISBN 3-540-54057-1

✍ Scribed by M. Schmidt

• Book ID: 102135926
• Publisher: John Wiley and Sons
• Year: 1992
• Tongue: English
• Weight: 99 KB
• Volume: 32
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.2150320608