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Film deposition by plasma techniques: M Konuma (Springer Series on Atoms and Plasmas, Edited by G Ecker, P Lambropoulos, I I Sobelman and H Walther, Vol 10), Springer, Berlin, 1992. ISBN 3-540-54057-1, X+244 pp. Price DM98

✍ Scribed by W Steckelmacher

Book ID: 103476342
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 148 KB
Volume: 44
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(93)90300-y

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