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Minority carrier lifetime and metallic-impurity mapping in silicon wafers

โœ Scribed by O. Palais; S. Martinuzzi; J.J. Simon


Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
123 KB
Volume
4
Category
Article
ISSN
1369-8001

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## Abstract An overview is given on recent developments at Fraunhofer ISE in the field of diagnostic techniques based on carrier lifetime measurements. The status of the different lifetime spectroscopy methods and the diagnostic capabilities of infrared carrier lifetime imaging are outlined. A comb