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Minority carrier lifetime and metallic-impurity mapping in silicon wafers

✍ Scribed by O. Palais; S. Martinuzzi; J.J. Simon

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 123 KB
Volume: 4
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(00)00162-1

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## Abstract An overview is given on recent developments at Fraunhofer ISE in the field of diagnostic techniques based on carrier lifetime measurements. The status of the different lifetime spectroscopy methods and the diagnostic capabilities of infrared carrier lifetime imaging are outlined. A comb