𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Miniaturized mid-infrared sensor technologies

✍ Scribed by Seong-Soo Kim; Christina Young; Boris Mizaikoff


Book ID
105891273
Publisher
Springer
Year
2007
Tongue
English
Weight
390 KB
Volume
390
Category
Article
ISSN
1618-2650

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Thermoelectric infrared sensors in CMOS
✍ R. Lenggenhager; H. Baltes; T. Elbel πŸ“‚ Article πŸ“… 1993 πŸ› Elsevier Science 🌐 English βš– 894 KB

We report several Integrated thermoelectnc Infrared sensors on thm sIllcon oxlde/tntrlde rmcrostructures realized by mdustnal CMOS IC technology, followed by one compatible maskless amsotroplc etchmg step No addltlonal matenal IS needed to enhance mfrared absorption in the spectral region between 8